Adapting a variety of optical capturing systems and hardware designs with stable image quality, combined with unique inspection algorithm software, it can effectively inspect, classify, and filter invalid defects of various hole damages and surface abnormal defects generated or remaining after deposition and laser repair. Applied to CMM and FMM products.
OLED Mask AOI
Description
✔ Resolution and defect inspection capabilities range up to 3μm-5μm.
✔ The inspection area can cover both the mask area and the outer frame area.
✔ The inspection technology can support different image designs and reticle mask products of any shape.
✔ Intelligent defect classification function.
